| | | | | | | | |
| Name of Subsidiary | | Jurisdiction |
| ATMI International Trading Co. Ltd. | | China |
| CMC Materials B.V. | | The Netherlands |
| CMC Materials Global Corp. | | Delaware |
| CMC Korea Co. Ltd | | South Korea |
| CMC Materials LLC | | Delaware |
| CMC Materials Sealweld Canada, Inc. | | Canada |
| CMC Materials Shanghai Co., Ltd. | | China |
| CMC Materials Taiwan Co., Ltd. | | Taiwan |
| Entegris Canada Limited | | Canada |
| Digital Specialty Chemicals UK Limited | | United Kingdom |
| Entegris Asia LLC | | Delaware |
| Entegris Asia-U.S. LLC | | Delaware |
| Entegris Asia Pte. Ltd. | | Singapore |
| Entegris Ecosys LLC | | Delaware |
| Entegris GmbH | | Germany |
| Entegris GP, Inc. | | Delaware |
| Entegris International Holdings II B.V. | | The Netherlands |
| Entegris International Holdings VIII LLC | | The Netherlands |
| Entegris International Holdings, LLC | | Delaware |
| Entegris Ireland Unlimited Company | | Ireland |
| Entegris Israel Ltd. | | Israel |
| Entegris Japan Co. Ltd. | | Japan |
| Entegris Korea Co., Ltd. | | South Korea |
| Entegris Korea II Ltd. | | South Korea |
| Entegris Malaysia Sdn. Bhd. | | Malaysia |
| Entegris (Shanghai) Microelectronics Trading Company Ltd. | | China |
| Entegris Pacific Ltd. | | Delaware |
| Entegris Pacific Pte., Ltd | | Singapore |
| Entegris Professional Solutions, LLC | | Delaware |
| Entegris SAS | | France |
| Entegris Singapore Pte. Ltd. | | Singapore |
| Entegris Specialty Materials, LLC | | Delaware |
| Entegris Taiwan Holdings, LLC | | Delaware |
| Entegris Taiwan Technologies Co. Ltd. | | Taiwan |
| Flowchem LLC | | Delaware |
| FLX Inc. | | Texas |
| Hanguk CMC Co., Ltd | | South Korea |
| Hanguk Entegris Co., Ltd | | South Korea |
| Hangzhou Anow Filtration and Materials Co., Ltd. | | China |
| Hangzhou AiNuo Microfiltration Co., Ltd. | | China |
| International Development Test Co., Ltd. | | Taiwan |
| International Test Solutions, LLC | | Delaware |
| KMG-Bernuth, Inc. | | Delaware |
| KMG-Flowchem, Inc. | | Delaware |